연구장비 상세보기

장비기본정보

기관명
한국생산기술연구원 원주뿌리기술지원센터
장비명
주사전자현미경 (Field emission scanning electron microscope)
모델명
SU5000
제작사(국가)
HITACHI(일본)
제작년도
2018
용도
분석
분류
영상장비
취득일
2018.05.23
장비설명
주사전자현미경은 전자선이 시료면 위를 주사(scanning)할 때 시료에서 발생되는 여러 가지 신호 중 그 발생확률이 가장 많은 이차전자(secondary electron) 또는 반사전자(back scattered electron)를 검출하는 것으로 대상 시료를 관찰한다.
장비구성

성능
"1. Resolution
SE resolution: 1.2nm or less @ 30kV
3.0nm or less @ 1kV
2. Magnification: 18 – 1,000,000X or more
(Based on 800x600 pixel monitor display)

3. System Operation: Microsoft® Windows XP or more
Standard Mouse, Knob-set and Keyboard Operation

4. Electron optics
1) Electron gun: ZrO/W Schottky emission electron gun
2) Accelerating Voltage: 0.5 – 30kV or more (should be adjustable in 100V steps)
3) Landing voltage: 0.1k – 2kV or more (should be adjustable in 100V steps)
4) Beam current: 200nA maximum or more
5) Lens System : Three-stage electromagnetic lens reduction system
6) Astigmatism: Electromagnetic 8-pole X,Y method correcting unit
7) Scanning coil: Two-stage electromagnetic deflection method
8) Objective Lens Aperture: Click stop, strip aperture with five positions or more
(open, 150μm, 70μm, 30μm, and 20μm)
* Aperture Heater should be Standard.
* Position Sensor should be Standard.
9) Beam blanking: Electromagnetic type(beam is blanked when image is frozen)
10) SE Bias Accelerator Plate: Improves SE collection efficiency at low voltages and short working distances
11) Objective Lens: Super conical lens
12) Image Shift: ± 50um or better at 15mm WD

5. Electron optics alignment
Alignment mode: Beam alignment mode
Aperture alignment mode
Stigma alignment mode
Ultra low voltage alignment mode
Auto focus alignment mode
Automated optical axis alignment and astigmatism correction mode

6. Detectors: Everhart-Thornley secondary electron detector (Standard)
Top detector for high resolution imaging through-the-Lens(TTL) or equivalent.

7. Vacuum System
1) Automatic evacuation:
Fully automatic vacuum sequence with pneumatic valves
Failsafe protection against loss of power, air pressure and vacuum
User friendly and accurate computer control of vacuum levels
2) Vacuum pumps:
Two ion-pumps (30 l/s x1, and 20l/s x1) or more
NTIS NO
NFEC-2018-06-244260
E-Tube NO
1805-A-0198

장비이용안내

사용방법
기관의뢰
사용료유형
시간당
이용료
60,000원
설치형태
고정
설치장소
한국생산기술연구원 원주뿌리기술지원센터
장비상태
정상
담당자
김효규
연락처
0337475415
팩스
0337475404
사용방법
온라인

주소: (24047) 강원도 춘천시 신북읍 신북로 61-10 강원테크노파크 기술혁신지원센터 TEL/033-248-5611
COPYRIGHT (C) 2020 BY 강원테크노파크. ALL RIGHTS RESERVED.

logo


TOP